Powering off Cinterion modems is done with the AT^SMSO command. Once this command is sent to the device, ModemManager still needs to wait to get an unsolicited ^SHUTDOWN message from the modem, which is when the shutdown is considered complete. Newer Cinterion devices, though, don't seem to follow this rule and just reply OK to AT^SMSO (i.e. no ^SHUTDOWN), but instead, they will remove the tty ports.